JPH0199099U - - Google Patents
Info
- Publication number
- JPH0199099U JPH0199099U JP19550287U JP19550287U JPH0199099U JP H0199099 U JPH0199099 U JP H0199099U JP 19550287 U JP19550287 U JP 19550287U JP 19550287 U JP19550287 U JP 19550287U JP H0199099 U JPH0199099 U JP H0199099U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- shutter
- divided
- opening
- irradiation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550287U JPH0199099U (en]) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550287U JPH0199099U (en]) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199099U true JPH0199099U (en]) | 1989-07-03 |
Family
ID=31486175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19550287U Pending JPH0199099U (en]) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199099U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5954199A (ja) * | 1982-09-22 | 1984-03-28 | 株式会社東芝 | 中性粒子入射装置 |
| JPS6235639A (ja) * | 1985-08-09 | 1987-02-16 | Nippon Kogaku Kk <Nikon> | アライメント装置 |
-
1987
- 1987-12-22 JP JP19550287U patent/JPH0199099U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5954199A (ja) * | 1982-09-22 | 1984-03-28 | 株式会社東芝 | 中性粒子入射装置 |
| JPS6235639A (ja) * | 1985-08-09 | 1987-02-16 | Nippon Kogaku Kk <Nikon> | アライメント装置 |